Design, Fabrication of Optical Sensors and Applications
Özet
As is known, semiconductor materials can be categorized according to whether they have direct or indirect energy bands. It is known that materials with direct band gaps can be used as both illumination and sensing sources. Indirect bandgap materials are mostly used in the production of sensor products. Innovative methods used in designing and producing sensors require integrating the relevant materials into the electronic interface and creating a communication infrastructure to the desired standards. These requirements bring innovations in housing, guiding, electronic connection, and integration. The limits of Moore's law, developing photonics-based technologies and fiber technologies offer different solutions in the field of imaging and sensing. In the future, hybrid systems that may emerge with the development of quantum technologies will offer different sensitivity, different detection, and different types of examination in many fields.
This chapter will discuss the capabilities of direct and indirect materials with the coating technologies used today, their working principles, and the differences in their usage areas. The areas of use of the developed and to be developed in the future sensor systems will be informed and their potential application areas will be mentioned.
Referanslar
Lepore, M., & Delfino, I. (2021). Optical Sensors Technology and Applications. Sensors, 22(20), 7905.
Mário F S Ferreira et al 2017 J. Opt. 19 083001.
R.Narayanaswamy and O.S.Wolfbeis, Optical Sensors, Chemical Sensors and Biosensors Series, VoL.1, Springer-Verlag, Germany, 2004.
Agrawal, Niteshkumar & Singh, Lokendra & Rane, Jayesh. (2023). The Future of Optical Fiber Sensors
Sensale-Rodriguez, B., Yan, R., Kelly, M. et al. Broadband graphene terahertz modulators enabled by intraband transitions. Nat Commun 3, 780 (2012).
Petersen, C., Møller, U., Kubat, I. et al. Mid-infrared supercontinuum covering the 1.4–13.3 μm molecular fingerprint region using ultra-high NA chalcogenide step-index fibre. Nature Photon 8, 830–834 (2014).
Rogers, A. (2000). Distributed Optical-Fibre Sensors. Journal of Physics D: Applied Physics. 19. 2237. 10.1088/0022-3727/19/12/004.
Stéphane Bernabe, Quentin Wilmart, Kobi Hasharoni, Karim Hassan, Yvain Thonnart, et al.. Silicon Photonics for Terabit/s communication in Data Centers and Exascale Computers. Solid-State Electronics, 2021, 179, pp.10.1016/j.sse.2020.107928. ff10.1016/j.sse.2020.107928ff. ffcea-03463711f
Ago, H., Solís-Fernández, P. Science and applications of 2.5D materials: development, opportunities and challenges. NPG Asia Mater 16, 31 (2024).
Krishna, G. , Prasannan, G. , Sudheer, S. and Pillai, V. (2015) Design of Ultra-Low Loss Highly Nonlinear Dispersion Flattened Octagonal Photonic Crystal Fibers. Optics and Photonics Journal, 5, 335-343.
Seraji, F. and Kasiri, S. (2015) Optimization of Macrobending Loss in Small and Large Mode Area Photonic Crystal Fibers. Open Access Library Journal, 2, 1-6.
SMULLIN, L., FIOCCO, G. Optical Echoes from the Moon. Nature 194, 1267 (1962).
Addanki, S., Amiri, I., & Yupapin, P. (2018). Review of optical fibers-introduction and applications in fiber lasers. Results in Physics, 10, 743-750.
Qu, W.; Chen, Y.; Ma, C.; Peng, D.; Bai, X.; Zhao, J.; Liu, S.; Luo, L. Application of Optical Fiber Sensing Technology and Coating Technology in Blood Component Detection and Monitoring. Coatings 2024, 14, 173.
Hancock, S., Anderson, K., Disney, M., & Gaston, K. J. (2016). Measurement of fine-spatial-resolution 3D vegetation structure with airborne waveform lidar: Calibration and validation with voxelised terrestrial lidar. Remote Sensing of Environment, 188, 37-50.
Rothberg, S., Allen, M., Castellini, P., Di Maio, D., Dirckx, J., Ewins, D., Halkon, B., Muyshondt, P., Paone, N., Ryan, T., Steger, H., Tomasini, E., Vanlanduit, S., & Vignola, J. (2017). An international review of laser Doppler vibrometry: Making light work of vibration measurement. Optics and Lasers in Engineering, 99, 11-22.
Hrmo, P., Wilhelm, B., Gerster, L. et al. Native qudit entanglement in a trapped ion quantum processor. Nat Commun 14, 2242 (2023).
Rodriguez, A., Dieguez, P., Urroz, J.C. et al. Optical fiber sensor for water velocity measurement in rivers and channels. Sci Rep 14, 13377 (2024).
Budinski, L. (2021). Quantum algorithm for the Navier–Stokes equations by using the stream function-vorticity formulation and the lattice Boltzmann method. International Journal of Quantum Information.
Charaev, I., Batson, E.K., Cherednichenko, S. et al. Single-photon detection using large-scale high-temperature MgB2 sensors at 20 K. Nat Commun 15, 3973 (2024).
Gao, Q., Nakamura, H., Gujarati, T. P., Jones, G. O., Rice, J. E., Wood, S. P., Pistoia, M., Garcia, J. M., & Yamamoto, N. (2019). Computational Investigations of the Lithium Superoxide Dimer Rearrangement on Noisy Quantum Devices.
Albero Blanquer, L., Marchini, F., Seitz, J.R. et al. Optical sensors for operando stress monitoring in lithium-based batteries containing solid-state or liquid electrolytes. Nat Commun 13, 1153 (2022).
Miele, E., Dose, W. M., Manyakin, I., Frosz, M. H., Ruff, Z., De Volder, M. F., Grey, C. P., Baumberg, J. J., & Euser, T. G. (2022). Hollow-core optical fibre sensors for operando Raman spectroscopy investigation of Li-ion battery liquid electrolytes. Nature Communications, 13(1), 1-10.
Mandracchia, B., Zheng, C., Rajendran, S., Liu, W., Forghani, P., Xu, C., & Jia, S. (2024). High-speed optical imaging with sCMOS pixel reassignment. Nature Communications, 15(1), 1-12.
Smalley, J. S., Ren, X., Lee, J. Y., Ko, W., Joo, W., Park, H., Yang, S., Wang, Y., Lee, C. S., Choo, H., Hwang, S., & Zhang, X. (2020). Subwavelength pixelated CMOS color sensors based on anti-Hermitian metasurface. Nature Communications, 11(1), 1-7.
Wang, X., Redding, B., Karl, N., Long, C., Zhu, Z., Skowronek, J., Pang, S., Brady, D., & Sarma, R. (2024). Integrated photonic encoder for low power and high-speed image processing. Nature Communications, 15(1), 1-13.
A. Kholmatov, H. Nasibov and F. Hacizade, "Hyperspectral image processing and display techniques in the context of forensic document investigation," 2012 20th Signal Processing and Communications Applications Conference (SIU), Mugla, Turkey, 2012, pp. 1-4.
From F. Dell’Endice et al (2009). Improving radiometry of imaging spectrometers by using programmable spectral regions of interest. ISPRS J Photogramm Remote Sens, Vol. 64, Issue 6, pp. 632-639.
Fang, J., Huang, K., Qin, R., Liang, Y., Wu, E., Yan, M., & Zeng, H. (2024). Wide-field mid-infrared hyperspectral imaging beyond video rate. Nature Communications, 15(1), 1-10.
Yako, M., Yamaoka, Y., Kiyohara, T., Hosokawa, C., Noda, A., Tack, K., Spooren, N., Hirasawa, T., & Ishikawa, A. (2023). Video-rate hyperspectral camera based on a CMOS-compatible random array of Fabry–Pérot filters. Nature Photonics, 17(3), 218-223.
Han, X., Zhong, H., Li, K., Xue, X., Wu, W., Hu, N., Lu, X., Huang, J., Xiao, G., Mai, Y., & Guo, T. (2024). Operando monitoring of dendrite formation in lithium metal batteries via ultrasensitive tilted fiber Bragg grating sensors. Light: Science & Applications, 13(1), 1-14.
Ilchenko, O., Pilhun, Y., Kutsyk, A., Slobodianiuk, D., Goksel, Y., Dumont, E., Vaut, L., Mazzoni, C., Morelli, L., Boisen, S., Stergiou, K., Aulin, Y., Rindzevicius, T., Andersen, T. E., Lassen, M., Mundhada, H., Jendresen, C. B., Philipsen, P. A., Hædersdal, M., . . . Boisen, A. (2024). Optics miniaturization strategy for demanding Raman spectroscopy applications. Nature Communications, 15(1), 1-14.
Di Santo R, Niccolini B, Romanò S, Vaccaro M, Di Giacinto F, De Spirito M, Ciasca G. Advancements in Mid-Infrared spectroscopy of extracellular vesicles. Spectrochim Acta A Mol Biomol Spectrosc. 2024 Jan 15;305:123346. doi: 10.1016/j.saa.2023.123346.
Ishigane, G., Toda, K., Tamamitsu, M., Shimada, H., Badarla, V. R., & Ideguchi, T. (2023). Label-free mid-infrared photothermal live-cell imaging beyond video rate. Light: Science & Applications, 12(1), 1-14.
Liu, W., Yang, X., Wang, Z., Li, Y., Li, J., Feng, Q., Xie, X., Xin, W., Xu, H., & Liu, Y. (2023). Self-powered and broadband opto-sensor with bionic visual adaptation function based on multilayer γ-InSe flakes. Light: Science & Applications, 12(1), 1-11.
Huang, P., Jiang, B., Chen, H., Xu, J., Wang, K., Zhu, C., Hu, X., Li, D., Zhen, L., Zhou, F., Qin, J., & Xu, C. (2023). Neuro-inspired optical sensor array for high-accuracy static image recognition and dynamic trace extraction. Nature Communications, 14(1), 1-9.
Tseng, E., Colburn, S., Whitehead, J., Huang, L., Baek, S., Majumdar, A., & Heide, F. (2021). Neural nano-optics for high-quality thin lens imaging. Nature Communications, 12(1), 1-7.
Ilchenko O, Pilhun Y, Kutsyk A, Slobodianiuk D, Goksel Y, Dumont E, Vaut L, Mazzoni C, Morelli L, Boisen S, Stergiou K, Aulin Y, Rindzevicius T, Andersen TE, Lassen M, Mundhada H, Jendresen CB, Philipsen PA, Hædersdal M, Boisen A. Optics miniaturization strategy for demanding Raman spectroscopy applications. Nat Commun. 2024 Apr 8;15(1):3049.
Liu, B. (2024). Manufacturing Equipment for Silicon Wafer. In: Wang, Y., Chi, MH., Lou, J.JC., Chen, CZ. (eds) Handbook of Integrated Circuit Industry. Springer, Singapore.
Junyang Zhang 2022 J. Phys.: Conf. Ser. 2386 012065
Pei, Z., Fisher, G. R., & Liu, J. (2008). Grinding of silicon wafers: A review from historical perspectives. International Journal of Machine Tools and Manufacture, 48(12-13), 1297-1307. https://doi.org/10.1016/j.ijmachtools.2008.05.009
Hansen, Anders & Hao, Nan & O'Shea, Erin. (2015). High-throughput microfluidics to control and measure signaling dynamics in single yeast cells. Nature protocols. 10. 1181-97. 10.1038/nprot.2015.079.
Weicheng Tian 2023 J. Phys.: Conf. Ser. 2608 012016
Khaidarov, E., Eschimese, D., Lai, K. H., Huang, A., Fu, Y. H., Lin, Q., & Kuznetsov, A. I. (2022). Large-scale vivid metasurface color printing using advanced 12-in. Immersion photolithography. Scientific Reports, 12(1), 1-6.
Zheng, L., Zywietz, U., Birr, T., Duderstadt, M., Overmeyer, L., Roth, B., & Reinhardt, C. (2021). UV-LED projection photolithography for high-resolution functional photonic components. Microsystems & Nanoengineering, 7(1), 1-11.
Paik, S., Kim, G., Chang, S., Lee, S., Jin, D., Jeong, K., Lee, I. S., Lee, J., Moon, H., Lee, J., Chang, K., Choi, S. S., Moon, J., Jung, S., Kang, S., Lee, W., Choi, H., Choi, H., Kim, H. J., . . . Shim, W. (2020). Near-field sub-diffraction photolithography with an elastomeric photomask. Nature Communications, 11(1), 1-13.
G. A. Massey, "Microscopy and pattern generation with scanned evanescent waves," Appl. Opt. 23, 658-660 (1984)
https://www.thefoa.org/tech/ref/basic/fiber.html
https://en.wikipedia.org/wiki/Photolithography (2024).
Mário F S Ferreira et al 2017 J. Opt. 19 083001.
R.Narayanaswamy and O.S.Wolfbeis, Optical Sensors, Chemical Sensors and Biosensors Series, VoL.1, Springer-Verlag, Germany, 2004.
Agrawal, Niteshkumar & Singh, Lokendra & Rane, Jayesh. (2023). The Future of Optical Fiber Sensors
Sensale-Rodriguez, B., Yan, R., Kelly, M. et al. Broadband graphene terahertz modulators enabled by intraband transitions. Nat Commun 3, 780 (2012).
Petersen, C., Møller, U., Kubat, I. et al. Mid-infrared supercontinuum covering the 1.4–13.3 μm molecular fingerprint region using ultra-high NA chalcogenide step-index fibre. Nature Photon 8, 830–834 (2014).
Rogers, A. (2000). Distributed Optical-Fibre Sensors. Journal of Physics D: Applied Physics. 19. 2237. 10.1088/0022-3727/19/12/004.
Stéphane Bernabe, Quentin Wilmart, Kobi Hasharoni, Karim Hassan, Yvain Thonnart, et al.. Silicon Photonics for Terabit/s communication in Data Centers and Exascale Computers. Solid-State Electronics, 2021, 179, pp.10.1016/j.sse.2020.107928. ff10.1016/j.sse.2020.107928ff. ffcea-03463711f
Ago, H., Solís-Fernández, P. Science and applications of 2.5D materials: development, opportunities and challenges. NPG Asia Mater 16, 31 (2024).
Krishna, G. , Prasannan, G. , Sudheer, S. and Pillai, V. (2015) Design of Ultra-Low Loss Highly Nonlinear Dispersion Flattened Octagonal Photonic Crystal Fibers. Optics and Photonics Journal, 5, 335-343.
Seraji, F. and Kasiri, S. (2015) Optimization of Macrobending Loss in Small and Large Mode Area Photonic Crystal Fibers. Open Access Library Journal, 2, 1-6.
SMULLIN, L., FIOCCO, G. Optical Echoes from the Moon. Nature 194, 1267 (1962).
Addanki, S., Amiri, I., & Yupapin, P. (2018). Review of optical fibers-introduction and applications in fiber lasers. Results in Physics, 10, 743-750.
Qu, W.; Chen, Y.; Ma, C.; Peng, D.; Bai, X.; Zhao, J.; Liu, S.; Luo, L. Application of Optical Fiber Sensing Technology and Coating Technology in Blood Component Detection and Monitoring. Coatings 2024, 14, 173.
Hancock, S., Anderson, K., Disney, M., & Gaston, K. J. (2016). Measurement of fine-spatial-resolution 3D vegetation structure with airborne waveform lidar: Calibration and validation with voxelised terrestrial lidar. Remote Sensing of Environment, 188, 37-50.
Rothberg, S., Allen, M., Castellini, P., Di Maio, D., Dirckx, J., Ewins, D., Halkon, B., Muyshondt, P., Paone, N., Ryan, T., Steger, H., Tomasini, E., Vanlanduit, S., & Vignola, J. (2017). An international review of laser Doppler vibrometry: Making light work of vibration measurement. Optics and Lasers in Engineering, 99, 11-22.
Hrmo, P., Wilhelm, B., Gerster, L. et al. Native qudit entanglement in a trapped ion quantum processor. Nat Commun 14, 2242 (2023).
Rodriguez, A., Dieguez, P., Urroz, J.C. et al. Optical fiber sensor for water velocity measurement in rivers and channels. Sci Rep 14, 13377 (2024).
Budinski, L. (2021). Quantum algorithm for the Navier–Stokes equations by using the stream function-vorticity formulation and the lattice Boltzmann method. International Journal of Quantum Information.
Charaev, I., Batson, E.K., Cherednichenko, S. et al. Single-photon detection using large-scale high-temperature MgB2 sensors at 20 K. Nat Commun 15, 3973 (2024).
Gao, Q., Nakamura, H., Gujarati, T. P., Jones, G. O., Rice, J. E., Wood, S. P., Pistoia, M., Garcia, J. M., & Yamamoto, N. (2019). Computational Investigations of the Lithium Superoxide Dimer Rearrangement on Noisy Quantum Devices.
Albero Blanquer, L., Marchini, F., Seitz, J.R. et al. Optical sensors for operando stress monitoring in lithium-based batteries containing solid-state or liquid electrolytes. Nat Commun 13, 1153 (2022).
Miele, E., Dose, W. M., Manyakin, I., Frosz, M. H., Ruff, Z., De Volder, M. F., Grey, C. P., Baumberg, J. J., & Euser, T. G. (2022). Hollow-core optical fibre sensors for operando Raman spectroscopy investigation of Li-ion battery liquid electrolytes. Nature Communications, 13(1), 1-10.
Mandracchia, B., Zheng, C., Rajendran, S., Liu, W., Forghani, P., Xu, C., & Jia, S. (2024). High-speed optical imaging with sCMOS pixel reassignment. Nature Communications, 15(1), 1-12.
Smalley, J. S., Ren, X., Lee, J. Y., Ko, W., Joo, W., Park, H., Yang, S., Wang, Y., Lee, C. S., Choo, H., Hwang, S., & Zhang, X. (2020). Subwavelength pixelated CMOS color sensors based on anti-Hermitian metasurface. Nature Communications, 11(1), 1-7.
Wang, X., Redding, B., Karl, N., Long, C., Zhu, Z., Skowronek, J., Pang, S., Brady, D., & Sarma, R. (2024). Integrated photonic encoder for low power and high-speed image processing. Nature Communications, 15(1), 1-13.
A. Kholmatov, H. Nasibov and F. Hacizade, "Hyperspectral image processing and display techniques in the context of forensic document investigation," 2012 20th Signal Processing and Communications Applications Conference (SIU), Mugla, Turkey, 2012, pp. 1-4.
From F. Dell’Endice et al (2009). Improving radiometry of imaging spectrometers by using programmable spectral regions of interest. ISPRS J Photogramm Remote Sens, Vol. 64, Issue 6, pp. 632-639.
Fang, J., Huang, K., Qin, R., Liang, Y., Wu, E., Yan, M., & Zeng, H. (2024). Wide-field mid-infrared hyperspectral imaging beyond video rate. Nature Communications, 15(1), 1-10.
Yako, M., Yamaoka, Y., Kiyohara, T., Hosokawa, C., Noda, A., Tack, K., Spooren, N., Hirasawa, T., & Ishikawa, A. (2023). Video-rate hyperspectral camera based on a CMOS-compatible random array of Fabry–Pérot filters. Nature Photonics, 17(3), 218-223.
Han, X., Zhong, H., Li, K., Xue, X., Wu, W., Hu, N., Lu, X., Huang, J., Xiao, G., Mai, Y., & Guo, T. (2024). Operando monitoring of dendrite formation in lithium metal batteries via ultrasensitive tilted fiber Bragg grating sensors. Light: Science & Applications, 13(1), 1-14.
Ilchenko, O., Pilhun, Y., Kutsyk, A., Slobodianiuk, D., Goksel, Y., Dumont, E., Vaut, L., Mazzoni, C., Morelli, L., Boisen, S., Stergiou, K., Aulin, Y., Rindzevicius, T., Andersen, T. E., Lassen, M., Mundhada, H., Jendresen, C. B., Philipsen, P. A., Hædersdal, M., . . . Boisen, A. (2024). Optics miniaturization strategy for demanding Raman spectroscopy applications. Nature Communications, 15(1), 1-14.
Di Santo R, Niccolini B, Romanò S, Vaccaro M, Di Giacinto F, De Spirito M, Ciasca G. Advancements in Mid-Infrared spectroscopy of extracellular vesicles. Spectrochim Acta A Mol Biomol Spectrosc. 2024 Jan 15;305:123346. doi: 10.1016/j.saa.2023.123346.
Ishigane, G., Toda, K., Tamamitsu, M., Shimada, H., Badarla, V. R., & Ideguchi, T. (2023). Label-free mid-infrared photothermal live-cell imaging beyond video rate. Light: Science & Applications, 12(1), 1-14.
Liu, W., Yang, X., Wang, Z., Li, Y., Li, J., Feng, Q., Xie, X., Xin, W., Xu, H., & Liu, Y. (2023). Self-powered and broadband opto-sensor with bionic visual adaptation function based on multilayer γ-InSe flakes. Light: Science & Applications, 12(1), 1-11.
Huang, P., Jiang, B., Chen, H., Xu, J., Wang, K., Zhu, C., Hu, X., Li, D., Zhen, L., Zhou, F., Qin, J., & Xu, C. (2023). Neuro-inspired optical sensor array for high-accuracy static image recognition and dynamic trace extraction. Nature Communications, 14(1), 1-9.
Tseng, E., Colburn, S., Whitehead, J., Huang, L., Baek, S., Majumdar, A., & Heide, F. (2021). Neural nano-optics for high-quality thin lens imaging. Nature Communications, 12(1), 1-7.
Ilchenko O, Pilhun Y, Kutsyk A, Slobodianiuk D, Goksel Y, Dumont E, Vaut L, Mazzoni C, Morelli L, Boisen S, Stergiou K, Aulin Y, Rindzevicius T, Andersen TE, Lassen M, Mundhada H, Jendresen CB, Philipsen PA, Hædersdal M, Boisen A. Optics miniaturization strategy for demanding Raman spectroscopy applications. Nat Commun. 2024 Apr 8;15(1):3049.
Liu, B. (2024). Manufacturing Equipment for Silicon Wafer. In: Wang, Y., Chi, MH., Lou, J.JC., Chen, CZ. (eds) Handbook of Integrated Circuit Industry. Springer, Singapore.
Junyang Zhang 2022 J. Phys.: Conf. Ser. 2386 012065
Pei, Z., Fisher, G. R., & Liu, J. (2008). Grinding of silicon wafers: A review from historical perspectives. International Journal of Machine Tools and Manufacture, 48(12-13), 1297-1307. https://doi.org/10.1016/j.ijmachtools.2008.05.009
Hansen, Anders & Hao, Nan & O'Shea, Erin. (2015). High-throughput microfluidics to control and measure signaling dynamics in single yeast cells. Nature protocols. 10. 1181-97. 10.1038/nprot.2015.079.
Weicheng Tian 2023 J. Phys.: Conf. Ser. 2608 012016
Khaidarov, E., Eschimese, D., Lai, K. H., Huang, A., Fu, Y. H., Lin, Q., & Kuznetsov, A. I. (2022). Large-scale vivid metasurface color printing using advanced 12-in. Immersion photolithography. Scientific Reports, 12(1), 1-6.
Zheng, L., Zywietz, U., Birr, T., Duderstadt, M., Overmeyer, L., Roth, B., & Reinhardt, C. (2021). UV-LED projection photolithography for high-resolution functional photonic components. Microsystems & Nanoengineering, 7(1), 1-11.
Paik, S., Kim, G., Chang, S., Lee, S., Jin, D., Jeong, K., Lee, I. S., Lee, J., Moon, H., Lee, J., Chang, K., Choi, S. S., Moon, J., Jung, S., Kang, S., Lee, W., Choi, H., Choi, H., Kim, H. J., . . . Shim, W. (2020). Near-field sub-diffraction photolithography with an elastomeric photomask. Nature Communications, 11(1), 1-13.
G. A. Massey, "Microscopy and pattern generation with scanned evanescent waves," Appl. Opt. 23, 658-660 (1984)
https://www.thefoa.org/tech/ref/basic/fiber.html
https://en.wikipedia.org/wiki/Photolithography (2024).
Sayfalar
15-34
Gelecek
14 Şubat 2025
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