From Proof-of-Concept to Product: Design and Simulation of MEMS for Diagnosis
Synopsis
Micro-electromechanical system (MEMS) devices, such as sensors and actuators, are widely utilized in biomedical and health sciences, where they are known as Bio-MEMS. These devices offer several advantages, including their compact size (ranging from 1 µm to 1 mm), light weight, affordability, fast response, accurate measurements, high efficiency, and easy integration into systems. These features make Bio-MEMS suitable for various healthcare applications, including disease diagnosis, prevention, and treatment. Bio-MEMS design focuses on creating miniaturized devices for biomedical applications, combining microfabrication techniques with biological or medical requirements. Bio-MEMS devices are used for various purposes, including diagnostics, drug delivery, monitoring physiological signals. This section discusses key Bio-MEMS sensors, including those based on research and those commercially available, that are either currently used or can be used in medical equipment for diagnosing different diseases and the design of those sensors.
References
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MOUDGIL, Akshay; SWAMINATHAN, Sundaram. MEMS based piezoelectric sensor system for virus detection. In: 10th IEEE international conference on nano/micro engineered and molecular systems. IEEE, 2015. p. 337-342.
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SHAMEEM, Syed, et al. Design Of MEMS Sensor For The Detection Of Diabetes. In: 2018 3rd International Conference on Inventive Computation Technologies (ICICT). IEEE, 2018. p. 413-416.
DENNIS, John Ojur, et al. Modeling and finite element analysis simulation of MEMS based acetone vapor sensor for noninvasive screening of diabetes. Journal of Sensors, 2016, 2016.
HUANG, Xian, et al. A MEMS affinity glucose sensor using a biocompatible glucose-responsive polymer. Sensors and Actuators B: Chemical, 2009, 140.2: 603-609.
THORAT, Bali; JADHAV, Mukti. Design and Simulate MEMS Based Cantilever Biosensor for Detection of Tuberculosis. In: 2021 International Conference on Computational Intelligence and Computing Applications (ICCICA). IEEE, 2021. p. 1-4.
AMIN, F.; AHMED, S. Design, modeling and simulation of MEMS-based silicon Microneedles. In: Journal of Physics: Conference Series. IOP Publishing, 2013. p. 012049.
BISWAS, Sonali; GOGOI, Anup Kumar. Design issues of piezoresistive MEMS accelerometer for an application specific medical diagnostic system. IETE Technical Review, 2016, 33.1: 11-16.
SRINIVASA RAO, K., et al. Design and simulation MEMS based sensor for early detection of PD. In: International Conference on Electrical, Electronics, Communication, Computer and Optimization Techniques (ICEECCOT). IEEE. 2017.
BISWAS, Sonali; GOGOI, Anup Kr. Design and simulation of piezoresistive MEMS accelerometer for the detection of pathological tremor. In: IEEE SOUTHEASTCON 2014. IEEE, 2014. p. 1-5.
CHITRA, N.; GNANAMMAL, J. Grace Jency. A high performance MEMS piezoresistive accelerometer for pathological tremor diagnostic system. In: 2016 3rd International Conference on Devices, Circuits and Systems (ICDCS). IEEE, 2016. p. 157-160.
SHAHIRI-TABARESTANI, M.; GANJI, B. A.; SABBAGHI-NADOOSHAN, R. Design and simulation of new micro-electromechanical pressure sensor for measuring intraocular pressure. In: 2012 16th IEEE Mediterranean Electrotechnical Conference. IEEE, 2012. p. 208-211.
MISTRY, Kalyan Kumar; MAHAPATRA, Abhijit. Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement. Microsystem technologies, 2012, 18: 683-692.
HONG, Bin, Kai, J., Ren, Y., Han, J., Zou, Z., Ahn, C. H., & Kang, K. A.. Highly sensitive rapid, reliable, and automatic cardiovascular disease diagnosis with nanoparticle fluorescence enhancer and mems. In: Oxygen transport to tissue XXIX. Springer US, 2008. p. 265-273.
KOLPEKWAR, Abhijeet; BLANTON, Ronald D. Development of a MEMS testing methodology. In: Proceedings International Test Conference 1997. IEEE, 1997. p. 923-931.
KURMENDRA; KUMAR, Rajesh. MEMS based cantilever biosensors for cancer detection using potential bio-markers present in VOCs: a survey. Microsystem Technologies, 2019, 25.9: 3253-3267.
CHIRCOV, Cristina; GRUMEZESCU, Alexandru Mihai. Microelectromechanical systems (MEMS) for biomedical applications. Micromachines, 2022, 13.2: 164.
Wu J, Wang R, Yu H, Li G, Xu K, Tien NC, Roberts RC, Li D. Inkjet-printed microelectrodes on PDMS as biosensors for functionalized microfluidic systems. Lab on a Chip. 2015;15:690-5.
Pal RK, Pradhan S, Narayanan L, Yadavalli VK. Micropatterned conductive polymer biosensors on flexible PDMS films. Sensors and Actuators B: Chemical. 2018 Apr 15;259:498-504.
Jian A, Tang X, Feng Q, Duan Q, Ji J, Ma Z, Zhang W, Sang S. A PDMS surface stress biosensor with optimized micro-membrane: fabrication and application. Sensors and Actuators B: Chemical. 2017 Apr 1;242:969-76.
Li S, Horikawa S, Park MK, Chai Y, Vodyanoy VJ, Chin BA. Amorphous metallic glass biosensors. Intermetallics. 2012 Nov 1;30:80-5.
Kinser ER, Padmanabhan J, Yu R, Corona SL, Li J, Vaddiraju S, Legassey A, Loye A, Balestrini J, Solly DA, Schroers J. Nanopatterned bulk metallic glass biosensors. ACS sensors. 2017 Dec 22;2(12):1779-87.
Maas MB, Maybery GH, Perold WJ, Neveling DP, Dicks LM. Borosilicate glass fiber-optic biosensor for the detection of Escherichia coli. Current microbiology. 2018 Feb;75:150-5.
Guo Q, Zhu H, Liu F, Zhu AY, Reed JC, Yi F, Cubukcu E. Silicon-on-glass graphene-functionalized leaky cavity mode nanophotonic biosensor. Acs Photonics. 2014 Mar 19;1(3):221-7.
Rossi AM, Wang L, Reipa V, Murphy TE. Porous silicon biosensor for detection of viruses. Biosensors and Bioelectronics. 2007 Dec 15;23(5):741-5.
Zhang GJ, Zhang L, Huang MJ, Luo ZH, Tay GK, Lim EJ, Kang TG, Chen Y. Silicon nanowire biosensor for highly sensitive and rapid detection of Dengue virus. Sensors and Actuators B: Chemical. 2010 Apr 8;146(1):138-44.
Nugen SR, Asiello PJ, Connelly JT, Baeumner AJ. PMMA biosensor for nucleic acids with integrated mixer and electrochemical detection. Biosensors and Bioelectronics. 2009 Apr 15;24(8):2428-33.
Emre FB, Kesik M, Kanik FE, Akpinar HZ, Aslan-Gurel E, Rossi RM, Toppare L. A benzimidazole-based conducting polymer and a PMMA–clay nanocomposite containing biosensor platform for glucose sensing. Synthetic Metals. 2015 Sep 1;207:102-9.
Tripathy N, Kim DH. Metal oxide modified ZnO nanomaterials for biosensor applications. Nano convergence. 2018 Oct 3;5(1):27.
Liu J. DNA-stabilized, fluorescent, metal nanoclusters for biosensor development. TrAC Trends in Analytical Chemistry. 2014 Jun 1;58:99-111.
Malekzad H, Sahandi Zangabad P, Mirshekari H, Karimi M, Hamblin MR. Noble metal nanoparticles in biosensors: recent studies and applications. Nanotechnology reviews. 2017 Jun 27;6(3):301-29.
Jung IY, Kim JS, Choi BR, Lee K, Lee H. Hydrogel based biosensors for in vitro diagnostics of biochemicals, proteins, and genes. Advanced healthcare materials. 2017 Jun;6(12):1601475.
Nishat ZS, Hossain T, Islam MN, Phan HP, Wahab MA, Moni MA, Salomon C, Amin MA, Sina AA, Hossain MS, Kaneti YV. Hydrogel nanoarchitectonics: an evolving paradigm for ultrasensitive biosensing. Small. 2022 Jul;18(26):2107571.
MEHMOOD, Zahid; HANEEF, Ibraheem; UDREA, Florin. Material selection for micro-electro-mechanical-systems (MEMS) using Ashby's approach. Materials & design, 2018, 157: 412-430.
QIAN, Jin; ZHAO, Ya-Pu. Materials selection in mechanical design for microsensors and microactuators. Materials & design, 2002, 23.7: 619-625.
SRIKAR, V. T.; SPEARING, S. Mark. Materials selection in micromechanical design: an application of the Ashby approach. Journal of Microelectromechanical Systems, 2003, 12.1: 3-10.
PRATAP, Rudra; ARUNKUMAR, A. Material selection for MEMS devices. 2007.
PARATE, Ojasvita; GUPTA, Navneet. Material selection for electrostatic microactuators using Ashby approach. Materials & Design, 2011, 32.3: 1577-1581.
SRINIVASAN, Prasanna; SPEARING, S. Mark. Optimal materials selection for bimaterial piezoelectric microactuators. Journal of microelectromechanical systems, 2008, 17.2: 462-472.
YAZDANI, Morteza; PAYAM, Amir Farokh. A comparative study on material selection of microelectromechanical systems electrostatic actuators using Ashby, VIKOR and TOPSIS. Materials & Design (1980-2015), 2015, 65: 328-334.
NAGEL, David J.; ZAGHLOUL, Mona E. MEMS: micro technology, mega impact. IEEE Circuits and Devices Magazine, 2001, 17.2: 14-25.
GAU, Jen-Jr, et al. A MEMS based amperometric detector for E. coli bacteria using self-assembled monolayers. Biosensors and Bioelectronics, 2001, 16.9-12: 745-755.
GUPTA, Amit; AKIN, Demir; BASHIR, Rashid. Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2004, 22.6: 2785-2791.
GAU, Jen-Jr, et al. A MEMS based amperometric detector for E. coli bacteria using self-assembled monolayers. Biosensors and Bioelectronics, 2001, 16.9-12: 745-755.
Weber, M., Yerino, C., Montanaro, H., Lo, K. S. L., & Reed, M. (2011). Multiphysics simulations enable development of fast, cheap MEMS-based bacteria detector. Winner of.
VINEETHA, K. V., et al. Design, simulation and performance analysis of MEMS based bio-sensors for the detection of cholera and diarrhea. Microsystem Technologies, 2018, 24.12: 4785-4797.
MALAVIKA, J., et al. MEMS Biosensor Design and Simulation for Diagnostic Purposes. In: Journal of Physics: Conference Series. IOP Publishing, 2022. p. 012-018.
MOUDGIL, Akshay; SWAMINATHAN, Sundaram. MEMS based piezoelectric sensor system for virus detection. In: 10th IEEE international conference on nano/micro engineered and molecular systems. IEEE, 2015. p. 337-342.
KHAN, Muhammad Shahbaz, et al. MEMS sensors for diagnostics and treatment in the fight against COVID-19 and other pandemics. IEEE Access, 2021, 9: 61123-61149.
P. Singru, B. Mistry, R. Shetty, and S. Deopujari, ``Design of MEMS based piezo-resistive sensor for measuring pressure in endo-tracheal tube,'' in Proc. ASME Int. Mech. Eng. Congr. Expo., Houston, TX, USA, Nov. 2015, Art. no. V003T03A036.
T.-V. Nguyen, Y. Mizuki, T. Tsukagoshi, T. Takahata, M. Ichiki, and I. Shimoyama, ``MEMS-based pulse wave sensor utilizing a piezoresistive cantilever,'' Sensors, 2020, p. 1052
SHAMEEM, Syed, et al. Design Of MEMS Sensor For The Detection Of Diabetes. In: 2018 3rd International Conference on Inventive Computation Technologies (ICICT). IEEE, 2018. p. 413-416.
DENNIS, John Ojur, et al. Modeling and finite element analysis simulation of MEMS based acetone vapor sensor for noninvasive screening of diabetes. Journal of Sensors, 2016, 2016.
HUANG, Xian, et al. A MEMS affinity glucose sensor using a biocompatible glucose-responsive polymer. Sensors and Actuators B: Chemical, 2009, 140.2: 603-609.
THORAT, Bali; JADHAV, Mukti. Design and Simulate MEMS Based Cantilever Biosensor for Detection of Tuberculosis. In: 2021 International Conference on Computational Intelligence and Computing Applications (ICCICA). IEEE, 2021. p. 1-4.
AMIN, F.; AHMED, S. Design, modeling and simulation of MEMS-based silicon Microneedles. In: Journal of Physics: Conference Series. IOP Publishing, 2013. p. 012049.
BISWAS, Sonali; GOGOI, Anup Kumar. Design issues of piezoresistive MEMS accelerometer for an application specific medical diagnostic system. IETE Technical Review, 2016, 33.1: 11-16.
SRINIVASA RAO, K., et al. Design and simulation MEMS based sensor for early detection of PD. In: International Conference on Electrical, Electronics, Communication, Computer and Optimization Techniques (ICEECCOT). IEEE. 2017.
BISWAS, Sonali; GOGOI, Anup Kr. Design and simulation of piezoresistive MEMS accelerometer for the detection of pathological tremor. In: IEEE SOUTHEASTCON 2014. IEEE, 2014. p. 1-5.
CHITRA, N.; GNANAMMAL, J. Grace Jency. A high performance MEMS piezoresistive accelerometer for pathological tremor diagnostic system. In: 2016 3rd International Conference on Devices, Circuits and Systems (ICDCS). IEEE, 2016. p. 157-160.
SHAHIRI-TABARESTANI, M.; GANJI, B. A.; SABBAGHI-NADOOSHAN, R. Design and simulation of new micro-electromechanical pressure sensor for measuring intraocular pressure. In: 2012 16th IEEE Mediterranean Electrotechnical Conference. IEEE, 2012. p. 208-211.
MISTRY, Kalyan Kumar; MAHAPATRA, Abhijit. Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement. Microsystem technologies, 2012, 18: 683-692.
HONG, Bin, Kai, J., Ren, Y., Han, J., Zou, Z., Ahn, C. H., & Kang, K. A.. Highly sensitive rapid, reliable, and automatic cardiovascular disease diagnosis with nanoparticle fluorescence enhancer and mems. In: Oxygen transport to tissue XXIX. Springer US, 2008. p. 265-273.
KOLPEKWAR, Abhijeet; BLANTON, Ronald D. Development of a MEMS testing methodology. In: Proceedings International Test Conference 1997. IEEE, 1997. p. 923-931.
KURMENDRA; KUMAR, Rajesh. MEMS based cantilever biosensors for cancer detection using potential bio-markers present in VOCs: a survey. Microsystem Technologies, 2019, 25.9: 3253-3267.
CHIRCOV, Cristina; GRUMEZESCU, Alexandru Mihai. Microelectromechanical systems (MEMS) for biomedical applications. Micromachines, 2022, 13.2: 164.
Wu J, Wang R, Yu H, Li G, Xu K, Tien NC, Roberts RC, Li D. Inkjet-printed microelectrodes on PDMS as biosensors for functionalized microfluidic systems. Lab on a Chip. 2015;15:690-5.
Pal RK, Pradhan S, Narayanan L, Yadavalli VK. Micropatterned conductive polymer biosensors on flexible PDMS films. Sensors and Actuators B: Chemical. 2018 Apr 15;259:498-504.
Jian A, Tang X, Feng Q, Duan Q, Ji J, Ma Z, Zhang W, Sang S. A PDMS surface stress biosensor with optimized micro-membrane: fabrication and application. Sensors and Actuators B: Chemical. 2017 Apr 1;242:969-76.
Li S, Horikawa S, Park MK, Chai Y, Vodyanoy VJ, Chin BA. Amorphous metallic glass biosensors. Intermetallics. 2012 Nov 1;30:80-5.
Kinser ER, Padmanabhan J, Yu R, Corona SL, Li J, Vaddiraju S, Legassey A, Loye A, Balestrini J, Solly DA, Schroers J. Nanopatterned bulk metallic glass biosensors. ACS sensors. 2017 Dec 22;2(12):1779-87.
Maas MB, Maybery GH, Perold WJ, Neveling DP, Dicks LM. Borosilicate glass fiber-optic biosensor for the detection of Escherichia coli. Current microbiology. 2018 Feb;75:150-5.
Guo Q, Zhu H, Liu F, Zhu AY, Reed JC, Yi F, Cubukcu E. Silicon-on-glass graphene-functionalized leaky cavity mode nanophotonic biosensor. Acs Photonics. 2014 Mar 19;1(3):221-7.
Rossi AM, Wang L, Reipa V, Murphy TE. Porous silicon biosensor for detection of viruses. Biosensors and Bioelectronics. 2007 Dec 15;23(5):741-5.
Zhang GJ, Zhang L, Huang MJ, Luo ZH, Tay GK, Lim EJ, Kang TG, Chen Y. Silicon nanowire biosensor for highly sensitive and rapid detection of Dengue virus. Sensors and Actuators B: Chemical. 2010 Apr 8;146(1):138-44.
Nugen SR, Asiello PJ, Connelly JT, Baeumner AJ. PMMA biosensor for nucleic acids with integrated mixer and electrochemical detection. Biosensors and Bioelectronics. 2009 Apr 15;24(8):2428-33.
Emre FB, Kesik M, Kanik FE, Akpinar HZ, Aslan-Gurel E, Rossi RM, Toppare L. A benzimidazole-based conducting polymer and a PMMA–clay nanocomposite containing biosensor platform for glucose sensing. Synthetic Metals. 2015 Sep 1;207:102-9.
Tripathy N, Kim DH. Metal oxide modified ZnO nanomaterials for biosensor applications. Nano convergence. 2018 Oct 3;5(1):27.
Liu J. DNA-stabilized, fluorescent, metal nanoclusters for biosensor development. TrAC Trends in Analytical Chemistry. 2014 Jun 1;58:99-111.
Malekzad H, Sahandi Zangabad P, Mirshekari H, Karimi M, Hamblin MR. Noble metal nanoparticles in biosensors: recent studies and applications. Nanotechnology reviews. 2017 Jun 27;6(3):301-29.
Jung IY, Kim JS, Choi BR, Lee K, Lee H. Hydrogel based biosensors for in vitro diagnostics of biochemicals, proteins, and genes. Advanced healthcare materials. 2017 Jun;6(12):1601475.
Nishat ZS, Hossain T, Islam MN, Phan HP, Wahab MA, Moni MA, Salomon C, Amin MA, Sina AA, Hossain MS, Kaneti YV. Hydrogel nanoarchitectonics: an evolving paradigm for ultrasensitive biosensing. Small. 2022 Jul;18(26):2107571.
MEHMOOD, Zahid; HANEEF, Ibraheem; UDREA, Florin. Material selection for micro-electro-mechanical-systems (MEMS) using Ashby's approach. Materials & design, 2018, 157: 412-430.
QIAN, Jin; ZHAO, Ya-Pu. Materials selection in mechanical design for microsensors and microactuators. Materials & design, 2002, 23.7: 619-625.
SRIKAR, V. T.; SPEARING, S. Mark. Materials selection in micromechanical design: an application of the Ashby approach. Journal of Microelectromechanical Systems, 2003, 12.1: 3-10.
PRATAP, Rudra; ARUNKUMAR, A. Material selection for MEMS devices. 2007.
PARATE, Ojasvita; GUPTA, Navneet. Material selection for electrostatic microactuators using Ashby approach. Materials & Design, 2011, 32.3: 1577-1581.
SRINIVASAN, Prasanna; SPEARING, S. Mark. Optimal materials selection for bimaterial piezoelectric microactuators. Journal of microelectromechanical systems, 2008, 17.2: 462-472.
YAZDANI, Morteza; PAYAM, Amir Farokh. A comparative study on material selection of microelectromechanical systems electrostatic actuators using Ashby, VIKOR and TOPSIS. Materials & Design (1980-2015), 2015, 65: 328-334.
Pages
35-50
Published
February 14, 2025
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